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Hydrogen Recovery Technology for Polysilicon Production
Polysilicon reduction tail gas enters the circulating condensation scrubber. Under different pressure conditions, it undergoes a series of rectification, stripping and cryogenic processes in the chlorosilane stripping tower and HCl rectification tower. Through multi-stage gas-liquid rectification, stripping and scrubbing, hydrogen is separated from liquid HCl, realizing the recovery of high-purity hydrogen and liquid hot HCl. This turns polysilicon tail gas from waste into treasure, conserves resources and reduces energy consumption in the treatment process.
■ Technical Features
· Closed-loop production: Hydrogen is directly reused in the polysilicon reduction process, hydrogen chloride is returned to trichlorosilane synthesis, and chlorosilanes are reused after fractionation, reducing raw material consumption by more than 30%.· Difficult impurity control: Impurities such as nitrogen and methane in the tail gas are hard to separate via adsorption, requiring supporting catalytic deoxidation or chemical absorption units for further purification.
· Remarkable economic efficiency: Taking an enterprise with an annual output of 10,000 tons of polysilicon as an example, hydrogen recovered from tail gas can replace 80% of purchased liquid hydrogen, saving over 20 million yuan in annual costs.
■ Main Performance Indicators
· Unit capacity: 1,000～100,000 Nm³/h (depending on the scale of the polysilicon production line)· Purity: 99%~99.9999%
· Pressure: 1.2～3.0 MPa
· Temperature: 10～50℃ (PSA section)
■ Process Flow Schematic
